Design and Simulation of RF MEMS Switch for X-band Applications
Rudraswamy S B1, Bharath V N2, K Sanjay Nayak3, Balachandra H N4, Chireddy Chakradhar Reddy5
1Rudraswamy S B, Department of ECE, SJCE, Mysuru (Karnataka), India.
2Bharath V N, Department of ECE, SJCE, Mysuru (Karnataka), India.
3K Sanjay Nayak, Department of ECE, SJCE, Mysuru (Karnataka), India.
4Balachandra H N, Department of ECE, SJCE, Mysuru (Karnataka), India.
5Chireddy Chakradhar Reddy, Department of ECE, SJCE, Mysuru (Karnataka), India.
Manuscript received on 22 May 2019 | Revised Manuscript received on 12 June 2019 | Manuscript Published on 27 June 2019 | PP: 190-195 | Volume-8 Issue-1C May 2019 | Retrieval Number: A10330581C19/2019©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: This article presents the design and simulation of RF microelectromechanical systems (MEMS) switch which works at X-band frequency(8-12 GHz). The design consists of a thin micromechanical bridge suspended over a silicon nitride which is used as the dielectric material with 0.1 µm thickness and air gap of switch is 0.9 µm. The design, modelling and simulation are done using the COMSOL Multiphysics 5.1. The designed switch has low actuation voltage, low pull-in voltage, optimum capacitance ratio, low switching time which makes it a perfect switch to work at X-band frequency. The switch has actuation voltage of 5 V, pull-in voltage of 1.58 V, capacitance ratio 66 and switching timing of 35 µs.
Keywords: Capacitance Ratio, Low Actuation Voltage, Low Pull-In Voltage, MEMS- Micro Electromechinal Systems, RF Radio Frequency, Switching Time.
Scope of the Article: Microstrip Antenna Design and Application