A MEMS based Carbon Nanotube–Field Effect Transistor as a Gas Sensor
Sauvik Das Gupta1, Souvik Kundu2, Abhishek Mallik3

1Sauvik Das Gupta, Technical Consultant ESl, Kolkata (West Bengal), India.
2Souvik Kundu, B. Tech. Student, Heritage Institute Of Technology, Kolkata (West Bengal), India.
3Abhishek Mallik, Partner-ESL, Kolkata (West Bengal), India.

Manuscript received on 18 October 2012 | Revised Manuscript received on 25 October 2012 | Manuscript published on 30 October 2012 | PP: 38-42 | Volume-1 Issue-4, October 2012 | Retrieval Number: D0328091412/2012©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)

Abstract: This paper deals with the sensing and detection of harmful and toxic industrial gases which are posing a huge threat to the existence of life on earth. In this paper, we hypothise the fabrication of a MEMS based Carbon Nanotubes (CNT)- Field Effect Transistor(FET) which will act as a gas sensor having almost threefold sensitivity and efficiency than the other metal oxide gas sensors such as Tin oxide (SnO2) sensors, which are available in the market.The Field effect transistor of (CNTs) are of great interest for various application including chemical and biological sensing.CNTs can be designed to have specific properties by changing the ratio of the diameters of linearly joined CNTs, which in turn can be used in the fabrication of FETs.The fabricateddevices exhibit good lectrical characteristics showing high Transconductance even at low levels of Gate voltage.With the increasing demand of CNTs in many applications due to its unusual properties, we propose that the fabrication of these CNT- FETs will also be quite economical. In this respect, it is also estimated that with the advent of large scale synthesis methods like Chemical Vapor Deposition (CVD), Carbon Arc methods, Laser evaporation etc for CNTs, its cost is also expected to come down in future.
Keywords: CNT-FET, Economical, Gas sensor, MEMS, Transconductance

Scope of the Article: Wearable Sensors and Smart Glasses