A Review on Comb Drive Actuator
1Mohita, M.Tech Scholar, Department of Electronics and Communication Engineering, Om Institute of Technology & Management, Hisar (Haryana)-125005, India.
2Seema, Assistant Professor, Department of Electronics and Communication Engineering, Om Institute of Technology & Management, Hisar (Haryana)-125005, India.
Manuscript received on 04 July 2018 | Revised Manuscript received on 23 July 2018 | Manuscript published on 30 July 2018 | PP: 19-23 | Volume-7 Issue-3, July 2018 | Retrieval Number: C1760077318©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: The Large displacement comb actuators at low actuation voltage should employ large number of comb fingers, reduced distance between the combs and by increasing the width of the fingers. Polysilicon has been the dominant mechanical materials for MEMS fabrication (PDF) MEMS Electrostatic comb actuators with a novel trapezium comb shape produces less actuation voltage then regular rectangular shape.
Keywords: Actuator, shaped Comb Drive, Capacitance.
Scope of the Article: Sensor Networks, Actuators for Internet of Things