Design and Analysis of Series Configuration-Based Mems Switch
G V Ganesh1, K Srinivasa Rao2
1G V Ganesh, MEMS Research Center, Department of Electronics & Communication Engineering, Koneru Lakshmaih Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur-522502, Andhra Pradesh, India.
2K. Srinivasa Rao, MEMS Research Center, Department of Electronics & Communication Engineering, Koneru Lakshmaih Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur-522502, Andhra Pradesh, India.
Manuscript received on 15 March 2019 | Revised Manuscript received on 19 March 2019 | Manuscript published on 30 July 2019 | PP: 3460-3465 | Volume-8 Issue-2, July 2019 | Retrieval Number: B2808078219/19©BEIESP | DOI: 10.35940/ijrte.B2808.078219
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: This paper reports the design and analysis of series type MEMS switch. This switch can be used for tunable filter applications from DC-10GHz frequency range. The study briefly explains the design of switch and analysis of various switching parameters. Through electrostatic actuation mechanism the switch is optimized in terms of various parameters like beam thickness, beam width, airgap, conductor and dielectric materials. Study of proposed design with COMSOL for electromechanical analysis and HFSS for electromagnetic analysis. The switch has theoretical and simulated actuation voltages of 22.81V and 38V respectively. It has the switching time of 33.36μs. The upstate and down state capacitances of 0.286pF, 3.93fF respectively. When the switch is in ON state an insertion loss of less than -0.1dB and return loss of -15dB is achieved. When the switch is in OFF state an isolation loss of -0.1dB and return loss of -21dB is achieved at 3GHz.
Index Terms: Series Type, MEMS Switch, Tunable Filter, Actuation Voltage, Switching Time, Return Loss, Insertion Loss, Isolation Loss.
Scope of the Article: Routing, Switching and Addressing Techniques