Numerical Research of Flow Heat Transfer through Micro Channel of Mems Device
Priyanka Nimesh1, S. K. Rai2

1Priyanka Nimesh, Department of Mechanical Engineering, Meerut Institute of Engineering & Technology, Meerut (U.P), India.
2S. K. Rai, Department of Mechanical Engineering, Meerut Institute of Engineering & Technology, Meerut (U.P), India.
Manuscript received on 22 August 2019 | Revised Manuscript received on 11 September 2019 | Manuscript Published on 17 September 2019 | PP: 1551-1557 | Volume-8 Issue-2S8 August 2019 | Retrieval Number: B11020882S819/2019©BEIESP | DOI: 10.35940/ijrte.B1102.0882S819
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Abstract: Micro-channel has been increasingly applied in MEMS devices and electronics devices due to its higher efficiently heat dissipation rate, more compact size and lower cost. The present work demonstrates that the theoretical analysis of single phase micro channel has been investigated. To predict the behavior of micro-channel, the non-linear thermal hydraulic equations are developed namely mass, momentum and energy conservation, these equations are solved to predict the thermal physical properties and hydrodynamic behavior of the fluid in micro-channel. The configuration geometry of the problem has been made in design modular of commercial software ANSYS 15.0 Workbench and meshing of it has been done in ANSYS 15.0 Workbench fluent. Water is used as the working fluid in the micro-channel and the problem has been solved in ANSYS 15.0. To analyze the thermal behavior of micro-channel in force convection for various input power. Numerical simulation is carried out to calculate the wall temperature of the micro-channel, heat transfer coefficient (HTC) values etc. Next more simulation have been performed to investigate the parametric effect on the circular micro channel in terms of different diameter and length, and optimize the geometric parameters and coolant flow rate to maintain the critical temperature of the MEMS device (geometry and thermodynamic performance of micro-channel).
Keywords: Cfd:-Computational Fluid Dynamics, Mems: Micro-Electrical and Mechanical System, Dw:- Distilled Water, Mchx:-Micro-Channel Heat Exchanger, Mchs:- Micro-Channel Heat Sink .
Scope of the Article: Heat Transfer