Moems Based Micro Accelerometers Sensor Sensing Structures
Sundar Subramanian1, Thangadurai. N2, K. Gopalakrishna3
1Sundar Subramanian, Research Scholar, Department of Mechanical Engineering, JAIN (Deemed-to-be Univeristy), Bangalore, Karnataka, India
2Dr. Thangadurai. N, Professor and Head of the Department, Department of Electronics and Communication Engineering, JAIN (Deemed-to-be Univeristy), Bangalore, Karnataka, India
3Dr. K. Gopalakrishna, Centre for Incubation, Innovation, Research and Consultancy (CIIRC), Bangalore, Karnataka, India.

Manuscript received on 01 April 2019 | Revised Manuscript received on 04 May 2019 | Manuscript published on 30 May 2019 | PP: 15 | Volume-8 Issue-1, May 2019 | Retrieval Number: A1386058119/19©BEIESP
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Abstract: Optical MEMS based micro accelerometer integration of mechanical, electronics and optical system is having ability to sense and convert many physical quantities. In the proposed work the accelerometer-based sensing structures in photonic crystal configuration is analyzed. Radius of hole and rods in photonic crystal configuration is varied from 0.17μm to 0.19μm and dielectric constant of configuration is varied to Gallium Arsenide, Indium Phosphate and Silicon materials. Remarkable frequency shift in photonic crystal configuration and high-quality factor of 7212 is observed for the selection of silicon material. Analysis is carried for sensing structures in two configurations of photonic crystal called rods in air and holes in slab. This proposed work having an extensive scope in automobile and inertial navigation in future.
Index Terms: MEMS, GaAs, HIS, RIA, Accelerometer.
Scope of the Article: Remote Sensing