Substrate Integrated Waveguide based RF MEMS Cavity Filter
Garima Pathak

Garima pathak, Prof., Department of Electronics & Communication, K G Reddy College of Engineering & Technology, Hyderabad (Telangana), India.
Manuscript received on 21 November 2013 | Revised Manuscript received on 28 November 2013 | Manuscript published on 30 November 2013 | PP: 46-49 | Volume-2 Issue-5, November 2013 | Retrieval Number: E0858112513/2013©BEIESP
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Abstract: RF Micro-Electro-Mechanical System is one of the most promising technology as it provides potential of wide operational bandwidths, negligible interconnect losses, and almost ideal responses of switches and resonators. Structures such as low insertion loss and high Q-filters and tuners, resonators, and low-loss tunable phase shifters are few examples of revolutionary RF/microwave components that can be realized by using RF-MEMS technology. The given work focuses on the design and fabrication of multi-cavity high quality factor K-band MEMS filter, which employs substrate integrated waveguide (SIW) and micro-machined via-hole arrays by Inductively Coupled Plasma etching process. Non-radiation dielectric waveguide (NRD) will be formed by metal filled via-hole arrays and grounded planes. The three dimensional (3D) high resistivity silicon substrate filled cavity resonator is fed by current probes using CPW line. It will be designed and fabricated (if possible). Cavity filters are the basic circuitry behind a duplexer and are sharply tuned resonant circuit that allows only certain frequencies to pass. Filter of this kind are known as notch filters. Physically a cavity filter is a resonator inside a conducting “box” with coupling loops at the input and output. These cavities are constructed as cylinders, with an axial tuning capacitor.
Keywords: SIW, Via Holes, Cavity Filters. 

Scope of the Article: Microwave Filter